The Pacific Nanotechnology AFM reference, #P-000-0004-0, is helpful for establishing the performance of AFM
scanners as well as optical microscopes. The patterns in
the reference are made in a silicon nitride film that is
deposited on a silicon substrate. This combination gives
optimal color contrast when viewed with an optical microscope.
Figure 1 is a picture of the AFM reference viewed in
an optical microscope.
Each reference standard is shipped in a plastic "GelPac"
box. With dimensions of 14x14 mm, the reference can be
easily used in most commercial atomic force microscopes.
Figure 2 is a picture of the reference in its plastic shipping
container.
The patterns on the reference for AFM measurements are
a series of squares that are located in 10 separate locations.
The optical reference is made from a series of lines.
There are two sets of lines that are perpendicular. Figure 3
shows a diagram of the reference pattern.
Notes:
1. SiN on Silicon.
2. Feature height: nominal 75 nm.
3. Feature width +/- 0.1 microns.
4. The “box” patterns are labeled A1, A2, A3, A4, A5 across the first row, B1, B2, B3, B4, B5 across
the second row and C1, C2, C3, C4, C5 across the third row. |
