Advanced Scanner Design For Metrology Measurements
Precise and accurate measurements are assured with the advanced flexure piezo-scanner design used for moving the probe in the Nano-R™ Crystal Scanner™. With the flexure, minimal crosstalk is measured between the X-Y-Z axes and images show little to no background bow.
External calibration sensors are used for monitoring the motion of the flexure scanner. Such sensors are essential for linearizing and calibrating the scanner in the x,y and z axes. These sensors are essential for point and place measurements.
Nano-R™ Crystal Scanner Specifications:
- Range
- X-Y: 65 microns
Z: 8 microns
- Linearity
- X-Y-Z: < 1%
- Cross Talk
- XY: < 1%
ZX: < 2%
ZY: < 2%
- Noise
- Vertical: < .1 nm
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